Effects of Electrical Stress in Solution-Processed Spin-On Glass Dielectric Films: Frequency Dependence
نویسندگان
چکیده
In this work, the effects of frequency dependence transparent dielectric based on Spin-on Glass (SOG) under electrical stress is presented. The SOG thin films were cured at 200 °C in ambient air. capacitance-voltage and capacitance-frequency characteristics measured Metal-Oxide-Semiconductor (MOS) capacitors using film. addition, applied to MOS different voltage values during a long period time. results show, depending bias applied, reversible interface charge contribution an irreversible induced by states probably generated degradation
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ژورنال
عنوان ژورنال: Engineering proceedings
سال: 2021
ISSN: ['2673-4591']
DOI: https://doi.org/10.3390/micromachines2021-09543